Parameter Optimization of Mems-based Micro Triangular-prism-slit Electrode Pair as an Electro-conjugate Fluid Jet Generator

Study on electrodes, which are inserted into electro-conjugate fluid (ECF) and generate ECF jet, is still in progress. A sort of so-called triangular-prism-slit (TPS) electrode structure was proposed and it is often thought as a promising candidate for future ECF effect applications thanks to its relatively high performance and easy fabrication. Besides considering power density characteristic of ECF effect and miniaturization demands, micro TPS electrodes as minimal as several hundred micrometers show more attractive and significant. This paper is primarily about parameter optimization for micro TPS electrodes at a common operating point. The four researched structure parameters include thickness and slit width of slit electrode, tip angle of triangular-prism electrode and gap between them, while performance is evaluated by output pressure, flow rate and power. The micro TPS electrodes are fabricated by MEMS technology and the optimization work is realized by four corresponding groups of comparison experiments.